Abstract
A new identification method with micro/nano-indentation for plastic material parameters of film/substrate system is presented. The method is based on extensive finite element computation on, "soft film on hard substrate" cases indented with cone. The method also utilizes the substrate effect on load versus depth relation in the indentation, this effect has often been regarded as undesirable. The computational results were expressed as a response surface in a material parameter space, Based on the surface, and employing experimentally obtained load versus depth relation, the plastic material parameters of the film are identified. A numerical example determined by this method for different plastic properties of film/substrate system is given.
| Translated title of the contribution | Plastic properties identification of thin film utilizing substrate effect with conical indentation |
|---|---|
| Original language | Japanese |
| Pages (from-to) | 499-505 |
| Number of pages | 7 |
| Journal | 日本機械学会論文集 A編 = Transactions of the Japan Society of Mechanical Engineers, Series A |
| Volume | 74 |
| Issue number | 740 |
| DOIs | |
| Publication status | Published - 5 Apr 2008 |
| Externally published | Yes |
Keywords
- Film/substrate system
- Finite element method
- Indentation
- Inverse problem
- Plasticity
- Stress-strain measurement