Abstract
针对物体表面形貌无损探测，提出了一种基于大面积薄膜晶体管 (TFT) 和聚偏氟乙烯 (PVDF) 薄膜的表面形貌 探测方法，具有大面积、可覆形、便携化和高精度的特点。该方法利用电容传感器原理，将已广泛应用于半导体显示领域 的 TFT 阵列与传感器相结合，可精确定位物体表面微米级缺陷，测量分辨率达到 50 μm，实现了对物体表面形貌的精准无损 探测。
Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.
| Translated title of the contribution | Nondestructive Detection of Surface Morphology Based on Large-Area TFT and PVDF Films |
|---|---|
| Original language | Chinese (Simplified) |
| Pages (from-to) | 287-290 |
| Number of pages | 4 |
| Journal | 电子科技大学学报 |
| Volume | 49 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Mar 2020 |
| Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2020, Editorial Board of Journal of the University of Electronic Science and Technology of China. All right reserved.
Keywords
- PVDF
- Sensor
- Surface topography
- TFT