Skip to main navigation Skip to search Skip to main content

静电激励MEMS微结构吸合电压尺寸效应研究

Translated title of the contribution: Size-dependent pull-in voltage of electrostatically actuated MEMS
  • 王炳雷
  • , 周慎杰*
  • , 赵俊峰
  • , 陈曦
    • *Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review

7   Link opens in a new tab Citations (Scopus)

Fingerprint

Dive into the research topics of 'Size-dependent pull-in voltage of electrostatically actuated MEMS'. Together they form a unique fingerprint.
Sort by

Physics

Material Science

Engineering