静电激励MEMS微结构吸合电压尺寸效应研究

Translated title of the contribution: Size-dependent pull-in voltage of electrostatically actuated MEMS

王炳雷, 周慎杰*, 赵俊峰, 陈曦

*Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review

7 Citations (Scopus)

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