面向机器人触觉的柔性压力传感器

机器人触觉传感器需要同时满足对受力大小进行精确感知以及对作用位置进行精准定位。该文采用等离子体原 位极化工艺，在柔性电路板上制备了 PVDF-TrFE 压电薄膜。在 PVDF-TrFE 薄膜的制备中，以少量羟基磷灰石掺杂提高了 PVDF 的结晶性能，有利于 β 晶型的转化，进而提高了 PVDF 的压电系数，提升了 PVDF 对力的电学响应精度，从而提高了 感知器件灵敏度。采用柔性 PCB 电路板制备柔性 PVDF 压电传感器，不仅可以对力的大小实现三维传感，而且能够对作用 力的位置进行定位，从而可以应用于机器人触觉传感。

Robotic touch sensors need to satisfy both accurately sense on the force and precisely position of the force. In this paper, PVDF-TrFE piezoelectric film was fabricated on a flexible circuit board through an in-situ polarization method. The crystallinity of PVDF is improved by a small amount of hydroxyapatite doping, which is beneficial to the conversion of β crystal form, and thus increases the piezoelectric coefficients of PVDF. With the increased piezoelectric coefficient, the electrical response precision of PVDF to force is improved, and makes the PVDF-based pressure sensing device more sensible. The flexible PVDF piezoelectric sensor is fabricated by using a flexible PCB, which can not only realize three-dimensional sensing of the force level, but also locate the position of the force, so that it can be applied to the tactile sensing of the robot.