A multi-step supervisory control strategy for semiconductor device manufacturing

Christopher A. HARRISON; Richard GOOD; Daniel KADOSH; S. Joe QIN

doi:10.1109/cdc.2004.1429417

A multi-step supervisory control strategy for semiconductor device manufacturing

Christopher A. HARRISON^*, Richard GOOD, Daniel KADOSH, S. Joe QIN

^*Corresponding author for this work

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Referred Conference Paper › peer-review

2 Citations (Scopus)

Abstract

The goal of this paper is to develop a multi-step optimization framework for a semiconductor manufacturing process. A simple physics model of a flash memory cell is presented to demonstrate the idea, and a multi-step supervisory control strategy is simulated on a flash memory cell manufacturing process based on this model. The multi-step supervisory control strategy performs multiple optimizations of target inputs for a lot with newly available metrology after each step in the course of its processing. The proposed strategy is shown to confer a significant improvement in the control of product quality over a supervisory control strategy which uses a one-time optimization and an open loop implementation. This improvement is primarily due to the ability of the multi-step optimizer to compensate for the effect of error introduced at earlier steps using end-of-step metrology.

Original language	English
Title of host publication	2004 43rd IEEE Conference on Decision and Control (CDC)
Publisher	Institute of Electrical and Electronics Engineers
Pages	4237-4242
Number of pages	6
ISBN (Print)	0780386825
DOIs	https://doi.org/10.1109/cdc.2004.1429417
Publication status	Published - Dec 2004
Externally published	Yes
Event	43rd IEEE Conference on Decision and Control (CDC) - Nassau, Bahamas Duration: 14 Dec 2004 → 17 Dec 2004

Publication series

Name	Proceedings of the IEEE Conference on Decision and Control
Publisher	Institute of Electrical and Electronics Engineers
ISSN (Print)	0743-1546
ISSN (Electronic)	2576-2370

Conference

Conference	43rd IEEE Conference on Decision and Control (CDC)
Country/Territory	Bahamas
City	Nassau
Period	14/12/04 → 17/12/04

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10.1109/cdc.2004.1429417

Cite this

HARRISON, C. A., GOOD, R., KADOSH, D., & QIN, S. J. (2004). A multi-step supervisory control strategy for semiconductor device manufacturing. In 2004 43rd IEEE Conference on Decision and Control (CDC) (pp. 4237-4242). Article FrA04.2 (Proceedings of the IEEE Conference on Decision and Control). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/cdc.2004.1429417

@inproceedings{2213bc4b20fe435fbba3007e93c83b96,

title = "A multi-step supervisory control strategy for semiconductor device manufacturing",

abstract = "The goal of this paper is to develop a multi-step optimization framework for a semiconductor manufacturing process. A simple physics model of a flash memory cell is presented to demonstrate the idea, and a multi-step supervisory control strategy is simulated on a flash memory cell manufacturing process based on this model. The multi-step supervisory control strategy performs multiple optimizations of target inputs for a lot with newly available metrology after each step in the course of its processing. The proposed strategy is shown to confer a significant improvement in the control of product quality over a supervisory control strategy which uses a one-time optimization and an open loop implementation. This improvement is primarily due to the ability of the multi-step optimizer to compensate for the effect of error introduced at earlier steps using end-of-step metrology.",

author = "HARRISON, {Christopher A.} and Richard GOOD and Daniel KADOSH and QIN, {S. Joe}",

year = "2004",

month = dec,

doi = "10.1109/cdc.2004.1429417",

language = "English",

isbn = "0780386825",

series = "Proceedings of the IEEE Conference on Decision and Control",

publisher = "Institute of Electrical and Electronics Engineers",

pages = "4237--4242",

booktitle = "2004 43rd IEEE Conference on Decision and Control (CDC)",

note = "43rd IEEE Conference on Decision and Control (CDC) ; Conference date: 14-12-2004 Through 17-12-2004",

}

HARRISON, CA, GOOD, R, KADOSH, D & QIN, SJ 2004, A multi-step supervisory control strategy for semiconductor device manufacturing. in 2004 43rd IEEE Conference on Decision and Control (CDC)., FrA04.2, Proceedings of the IEEE Conference on Decision and Control, Institute of Electrical and Electronics Engineers, pp. 4237-4242, 43rd IEEE Conference on Decision and Control (CDC), Nassau, Bahamas, 14/12/04. https://doi.org/10.1109/cdc.2004.1429417

A multi-step supervisory control strategy for semiconductor device manufacturing. / HARRISON, Christopher A.; GOOD, Richard; KADOSH, Daniel et al.
2004 43rd IEEE Conference on Decision and Control (CDC). Institute of Electrical and Electronics Engineers, 2004. p. 4237-4242 FrA04.2 (Proceedings of the IEEE Conference on Decision and Control).

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Referred Conference Paper › peer-review

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AU - HARRISON, Christopher A.

AU - GOOD, Richard

AU - KADOSH, Daniel

AU - QIN, S. Joe

PY - 2004/12

Y1 - 2004/12

N2 - The goal of this paper is to develop a multi-step optimization framework for a semiconductor manufacturing process. A simple physics model of a flash memory cell is presented to demonstrate the idea, and a multi-step supervisory control strategy is simulated on a flash memory cell manufacturing process based on this model. The multi-step supervisory control strategy performs multiple optimizations of target inputs for a lot with newly available metrology after each step in the course of its processing. The proposed strategy is shown to confer a significant improvement in the control of product quality over a supervisory control strategy which uses a one-time optimization and an open loop implementation. This improvement is primarily due to the ability of the multi-step optimizer to compensate for the effect of error introduced at earlier steps using end-of-step metrology.

AB - The goal of this paper is to develop a multi-step optimization framework for a semiconductor manufacturing process. A simple physics model of a flash memory cell is presented to demonstrate the idea, and a multi-step supervisory control strategy is simulated on a flash memory cell manufacturing process based on this model. The multi-step supervisory control strategy performs multiple optimizations of target inputs for a lot with newly available metrology after each step in the course of its processing. The proposed strategy is shown to confer a significant improvement in the control of product quality over a supervisory control strategy which uses a one-time optimization and an open loop implementation. This improvement is primarily due to the ability of the multi-step optimizer to compensate for the effect of error introduced at earlier steps using end-of-step metrology.

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U2 - 10.1109/cdc.2004.1429417

DO - 10.1109/cdc.2004.1429417

M3 - Conference paper (refereed)

SN - 0780386825

T3 - Proceedings of the IEEE Conference on Decision and Control

SP - 4237

EP - 4242

BT - 2004 43rd IEEE Conference on Decision and Control (CDC)

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T2 - 43rd IEEE Conference on Decision and Control (CDC)

Y2 - 14 December 2004 through 17 December 2004

ER -

A multi-step supervisory control strategy for semiconductor device manufacturing

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