@inproceedings{2213bc4b20fe435fbba3007e93c83b96,
title = "A multi-step supervisory control strategy for semiconductor device manufacturing",
abstract = "The goal of this paper is to develop a multi-step optimization framework for a semiconductor manufacturing process. A simple physics model of a flash memory cell is presented to demonstrate the idea, and a multi-step supervisory control strategy is simulated on a flash memory cell manufacturing process based on this model. The multi-step supervisory control strategy performs multiple optimizations of target inputs for a lot with newly available metrology after each step in the course of its processing. The proposed strategy is shown to confer a significant improvement in the control of product quality over a supervisory control strategy which uses a one-time optimization and an open loop implementation. This improvement is primarily due to the ability of the multi-step optimizer to compensate for the effect of error introduced at earlier steps using end-of-step metrology.",
author = "HARRISON, \{Christopher A.\} and Richard GOOD and Daniel KADOSH and QIN, \{S. Joe\}",
year = "2004",
month = dec,
doi = "10.1109/cdc.2004.1429417",
language = "English",
isbn = "0780386825",
series = "Proceedings of the IEEE Conference on Decision and Control",
publisher = "Institute of Electrical and Electronics Engineers",
pages = "4237--4242",
booktitle = "2004 43rd IEEE Conference on Decision and Control (CDC)",
address = "United States",
note = "43rd IEEE Conference on Decision and Control (CDC) ; Conference date: 14-12-2004 Through 17-12-2004",
}