Adaptive run to run control for intermittent batch operations

S. Joe QIN; Glen W. SCHEID; Terrence J. RILEY

doi:10.1109/ACC.2002.1023958

Adaptive run to run control for intermittent batch operations

S. Joe QIN, Glen W. SCHEID, Terrence J. RILEY

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Referred Conference Paper › peer-review

2 Citations (Scopus)

Abstract

Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

Original language	English
Title of host publication	Proceedings of the 2002 American Control Conference
Publisher	Institute of Electrical and Electronics Engineers
Pages	2168-2173
Number of pages	6
ISBN (Electronic)	0780372999
ISBN (Print)	0780372980
DOIs	https://doi.org/10.1109/ACC.2002.1023958
Publication status	Published - May 2002
Externally published	Yes
Event	2002 American Control Conference (ACC) - Anchorage, United States Duration: 8 May 2002 → 10 May 2002

Publication series

Name	Proceedings of the American Control Conference
Publisher	Institute of Electrical and Electronics Engineers
ISSN (Print)	0743-1619
ISSN (Electronic)	2378-5861

Conference

Conference	2002 American Control Conference (ACC)
Country/Territory	United States
City	Anchorage
Period	8/05/02 → 10/05/02

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10.1109/ACC.2002.1023958

Cite this

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title = "Adaptive run to run control for intermittent batch operations",

abstract = "Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.",

author = "QIN, {S. Joe} and SCHEID, {Glen W.} and RILEY, {Terrence J.}",

year = "2002",

month = may,

doi = "10.1109/ACC.2002.1023958",

language = "English",

isbn = "0780372980",

series = "Proceedings of the American Control Conference",

publisher = "Institute of Electrical and Electronics Engineers",

pages = "2168--2173",

booktitle = "Proceedings of the 2002 American Control Conference",

note = "2002 American Control Conference (ACC) ; Conference date: 08-05-2002 Through 10-05-2002",

}

QIN, SJ, SCHEID, GW & RILEY, TJ 2002, Adaptive run to run control for intermittent batch operations. in Proceedings of the 2002 American Control Conference., 80, Proceedings of the American Control Conference, Institute of Electrical and Electronics Engineers, pp. 2168-2173, 2002 American Control Conference (ACC), Anchorage, Alaska, United States, 8/05/02. https://doi.org/10.1109/ACC.2002.1023958

Adaptive run to run control for intermittent batch operations. / QIN, S. Joe; SCHEID, Glen W.; RILEY, Terrence J.
Proceedings of the 2002 American Control Conference. Institute of Electrical and Electronics Engineers, 2002. p. 2168-2173 80 (Proceedings of the American Control Conference).

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Referred Conference Paper › peer-review

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N2 - Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

AB - Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

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Adaptive run to run control for intermittent batch operations

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