Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.
|Name||Proceedings of the American Control Conference|
|Publisher||Institute of Electrical and Electronics Engineers|
|Conference||2002 American Control Conference (ACC)|
|Period||8/05/02 → 10/05/02|