Coordinating advanced process control and scheduling in semiconductor manufacturing : Insights from single-stage models

Yiwei CAI; Erhan KUTANOGLU; John HASENBEIN; Joe QIN

Coordinating advanced process control and scheduling in semiconductor manufacturing : Insights from single-stage models

Yiwei CAI^*, Erhan KUTANOGLU^*, John HASENBEIN^*, Joe QIN^*

^*Corresponding author for this work

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Referred Conference Paper › peer-review

Abstract

Scheduling in semiconductor wafer fabrication is viewed important due to its effect on both proper utilization of expensive equipment and cycle time. The complex nature of manufacturing processes used in semiconductor manufacturing makes scheduling and other activities such as process and quality control more critical and more interdependent on each other. We investigate the interdependency, interaction, and potentially needed coordination between scheduling and advanced process control decisions. As a first step, we analyze the issue using simple models (single machine settings) both analytically and computationally, and draw insights for more complex and realistic situations.

Original language	English
Title of host publication	IIE Annual Conference and Expo 2007 - Industrial Engineering's Critical Role in a Flat World - Conference Proceedings
Pages	1381-1386
Number of pages	6
Publication status	Published - May 2007
Externally published	Yes
Event	IIE Annual Conference and Expo 2007 - Nashville, United States Duration: 19 May 2007 → 23 May 2007

Conference

Conference	IIE Annual Conference and Expo 2007
Country/Territory	United States
City	Nashville
Period	19/05/07 → 23/05/07

Keywords

Advanced process control
Coordination
Scheduling
Semiconductor manufacturing
Single-stage

Cite this

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title = "Coordinating advanced process control and scheduling in semiconductor manufacturing : Insights from single-stage models",

abstract = "Scheduling in semiconductor wafer fabrication is viewed important due to its effect on both proper utilization of expensive equipment and cycle time. The complex nature of manufacturing processes used in semiconductor manufacturing makes scheduling and other activities such as process and quality control more critical and more interdependent on each other. We investigate the interdependency, interaction, and potentially needed coordination between scheduling and advanced process control decisions. As a first step, we analyze the issue using simple models (single machine settings) both analytically and computationally, and draw insights for more complex and realistic situations.",

keywords = "Advanced process control, Coordination, Scheduling, Semiconductor manufacturing, Single-stage",

author = "Yiwei CAI and Erhan KUTANOGLU and John HASENBEIN and Joe QIN",

year = "2007",

month = may,

language = "English",

pages = "1381--1386",

booktitle = "IIE Annual Conference and Expo 2007 - Industrial Engineering's Critical Role in a Flat World - Conference Proceedings",

note = "IIE Annual Conference and Expo 2007 ; Conference date: 19-05-2007 Through 23-05-2007",

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CAI, Y, KUTANOGLU, E, HASENBEIN, J & QIN, J 2007, Coordinating advanced process control and scheduling in semiconductor manufacturing : Insights from single-stage models. in IIE Annual Conference and Expo 2007 - Industrial Engineering's Critical Role in a Flat World - Conference Proceedings. pp. 1381-1386, IIE Annual Conference and Expo 2007, Nashville, Tennessee, United States, 19/05/07.

Coordinating advanced process control and scheduling in semiconductor manufacturing : Insights from single-stage models. / CAI, Yiwei; KUTANOGLU, Erhan; HASENBEIN, John et al.
IIE Annual Conference and Expo 2007 - Industrial Engineering's Critical Role in a Flat World - Conference Proceedings. 2007. p. 1381-1386.

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Referred Conference Paper › peer-review

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AU - QIN, Joe

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AB - Scheduling in semiconductor wafer fabrication is viewed important due to its effect on both proper utilization of expensive equipment and cycle time. The complex nature of manufacturing processes used in semiconductor manufacturing makes scheduling and other activities such as process and quality control more critical and more interdependent on each other. We investigate the interdependency, interaction, and potentially needed coordination between scheduling and advanced process control decisions. As a first step, we analyze the issue using simple models (single machine settings) both analytically and computationally, and draw insights for more complex and realistic situations.

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KW - Coordination

KW - Scheduling

KW - Semiconductor manufacturing

KW - Single-stage

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Coordinating advanced process control and scheduling in semiconductor manufacturing : Insights from single-stage models

Abstract

Conference

Keywords

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