Design of microwave near-field microscope analyzer for material chips and Realization of a system

Baoguo YANG; Fushun NIAN; Yong XIANG; Zhenyu WANG; Lijun ZHAO; Chunqing XU

doi:10.1109/ICCCS52626.2021.9449290

Design of microwave near-field microscope analyzer for material chips and Realization of a system

Baoguo YANG, Fushun NIAN^*, Yong XIANG, Zhenyu WANG, Lijun ZHAO, Chunqing XU

^*Corresponding author for this work

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Research › peer-review

Abstract

In this paper, the technique and test method of microwave near-field microscopy are studied. The microwave circuit unit is integrated, and the microwave near-field microscope analyzer is designed and implemented. The working frequency is 10MHz 40GHz. Then, the calibration method of instrument and system is put forward. The electrical error and mechanical error are calibrated, and the system parameters are corrected. PMMA was used as sample to test and verify. Based on the analyzer, a microwave microscope system with a resolution of 100 nm is realized.

Original language	English
Title of host publication	2021 IEEE 6th International Conference on Computer and Communication Systems, ICCCS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1075-1078
Number of pages	4
ISBN (Electronic)	9780738126043
DOIs	https://doi.org/10.1109/ICCCS52626.2021.9449290
Publication status	Published - 23 Apr 2021
Externally published	Yes
Event	6th IEEE International Conference on Computer and Communication Systems, ICCCS 2021 - Chengdu, China Duration: 23 Apr 2021 → 26 Apr 2021

Conference

Conference	6th IEEE International Conference on Computer and Communication Systems, ICCCS 2021
Country/Territory	China
City	Chengdu
Period	23/04/21 → 26/04/21

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

Funding

Natural Science Foundation of Anhui Province: 1908085MF220 *Corresponding author

Keywords

Dielectric constant
microscopy
microwave
near-field

Access to Document

10.1109/ICCCS52626.2021.9449290

Cite this

YANG, B., NIAN, F., XIANG, Y., WANG, Z., ZHAO, L., & XU, C. (2021). Design of microwave near-field microscope analyzer for material chips and Realization of a system. In 2021 IEEE 6th International Conference on Computer and Communication Systems, ICCCS 2021 (pp. 1075-1078). Article 9449290 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICCCS52626.2021.9449290

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title = "Design of microwave near-field microscope analyzer for material chips and Realization of a system",

abstract = "In this paper, the technique and test method of microwave near-field microscopy are studied. The microwave circuit unit is integrated, and the microwave near-field microscope analyzer is designed and implemented. The working frequency is 10MHz 40GHz. Then, the calibration method of instrument and system is put forward. The electrical error and mechanical error are calibrated, and the system parameters are corrected. PMMA was used as sample to test and verify. Based on the analyzer, a microwave microscope system with a resolution of 100 nm is realized.",

keywords = "Dielectric constant, microscopy, microwave, near-field",

author = "Baoguo YANG and Fushun NIAN and Yong XIANG and Zhenyu WANG and Lijun ZHAO and Chunqing XU",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 6th IEEE International Conference on Computer and Communication Systems, ICCCS 2021 ; Conference date: 23-04-2021 Through 26-04-2021",

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month = apr,

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doi = "10.1109/ICCCS52626.2021.9449290",

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YANG, B, NIAN, F, XIANG, Y, WANG, Z, ZHAO, L & XU, C 2021, Design of microwave near-field microscope analyzer for material chips and Realization of a system. in 2021 IEEE 6th International Conference on Computer and Communication Systems, ICCCS 2021., 9449290, Institute of Electrical and Electronics Engineers Inc., pp. 1075-1078, 6th IEEE International Conference on Computer and Communication Systems, ICCCS 2021, Chengdu, China, 23/04/21. https://doi.org/10.1109/ICCCS52626.2021.9449290

Design of microwave near-field microscope analyzer for material chips and Realization of a system. / YANG, Baoguo; NIAN, Fushun; XIANG, Yong et al.
2021 IEEE 6th International Conference on Computer and Communication Systems, ICCCS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 1075-1078 9449290.

Research output: Book Chapters | Papers in Conference Proceedings › Conference paper (refereed) › Research › peer-review

TY - GEN

T1 - Design of microwave near-field microscope analyzer for material chips and Realization of a system

AU - YANG, Baoguo

AU - NIAN, Fushun

AU - XIANG, Yong

AU - WANG, Zhenyu

AU - ZHAO, Lijun

AU - XU, Chunqing

PY - 2021/4/23

Y1 - 2021/4/23

N2 - In this paper, the technique and test method of microwave near-field microscopy are studied. The microwave circuit unit is integrated, and the microwave near-field microscope analyzer is designed and implemented. The working frequency is 10MHz 40GHz. Then, the calibration method of instrument and system is put forward. The electrical error and mechanical error are calibrated, and the system parameters are corrected. PMMA was used as sample to test and verify. Based on the analyzer, a microwave microscope system with a resolution of 100 nm is realized.

AB - In this paper, the technique and test method of microwave near-field microscopy are studied. The microwave circuit unit is integrated, and the microwave near-field microscope analyzer is designed and implemented. The working frequency is 10MHz 40GHz. Then, the calibration method of instrument and system is put forward. The electrical error and mechanical error are calibrated, and the system parameters are corrected. PMMA was used as sample to test and verify. Based on the analyzer, a microwave microscope system with a resolution of 100 nm is realized.

KW - Dielectric constant

KW - microscopy

KW - microwave

KW - near-field

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U2 - 10.1109/ICCCS52626.2021.9449290

DO - 10.1109/ICCCS52626.2021.9449290

M3 - Conference paper (refereed)

AN - SCOPUS:85113287745

SP - 1075

EP - 1078

BT - 2021 IEEE 6th International Conference on Computer and Communication Systems, ICCCS 2021

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 6th IEEE International Conference on Computer and Communication Systems, ICCCS 2021

Y2 - 23 April 2021 through 26 April 2021

ER -

Design of microwave near-field microscope analyzer for material chips and Realization of a system

Abstract

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Keywords

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