Wafers that fail to meet their electrical specifications lead to scrap which negatively impacts yield and manufacturing costs. Most existing research has focused on controlling individual steps during the manufacturing process via run-to-run control, but almost no work has looked at directly controlling the electrical characteristics. A control scheme is proposed to directly control electrical parameter values. The control algorithm uses a model to predict electrical parameter values after each processing step and determines optimal adjustments for the future processing steps. Simulation results show significant reduction in electrical parameter variations for both constrained and unconstrained control.
|Number of pages||6|
|Journal||IFAC Proceedings Volumes|
|Publication status||Published - 2007|
|Event||8th IFAC Symposium on Dynamics and Control of Process Systems, 2007 - , Mexico|
Duration: 6 Jun 2016 → 8 Jun 2016
Bibliographical noteISBN: 9783902661647 <br/>This work was supported by JSPS KAKENHI Grant No. JP16K10904.
- Hierarchical control
- Least squares estimation
- Multi-step controllers