Fabricating and TCAD Optimization for a SiC Trench MOSFET With Tilted P-Shielding Implantation and Integrated TJBS

Bo YI*, Huan LI, Bingke ZHANG*, Yi XU, Wenkun SHI, Yong XIANG, Rong ZHOU, Junji CHENG, Haimeng HUANG, Moufu KONG, Hongqiang YANG

*Corresponding author for this work

Research output: Journal PublicationsJournal Article (refereed)peer-review

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