Fabricating and TCAD Optimization for a SiC Trench MOSFET With Tilted P-Shielding Implantation and Integrated TJBS

Bo YI^*, Huan LI, Bingke ZHANG^*, Yi XU, Wenkun SHI, Yong XIANG, Rong ZHOU, Junji CHENG, Haimeng HUANG, Moufu KONG, Hongqiang YANG

^*Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review