Fault Detection of Plasma Etchers Using Optical Emission Spectra

  • H. Henry YUE*
  • , S. Joe QIN
  • , Richard J. MARKLE
  • , Chris NAUERT
  • , Michael GATTO
    • *Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review

116 Citations (Scopus)

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Physics

Computer Science