High-frequency responses of granular CoFeHfO and amorphous CoZrTa magnetic materials

Liangliang LI; Dok Won LEE; Ming MAO; Thomas SCHNEIDER; Randhir BUBBER; Kyu-Pyung HWANG; Yongki MIN; Shan X. WANG

doi:10.1063/1.2749419

High-frequency responses of granular CoFeHfO and amorphous CoZrTa magnetic materials

Liangliang LI^*, Dok Won LEE, Ming MAO, Thomas SCHNEIDER, Randhir BUBBER, Kyu-Pyung HWANG, Yongki MIN, Shan X. WANG

^*Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review

25 Citations (Scopus)

Abstract

High-resistivity soft magnetic materials are receiving much attention as they have relatively low core loss at high frequencies. We developed magnetically soft granular CoFeHfO material by pulsed-dc reactive magnetron sputtering and compared its electrical and magnetic properties, especially permeability spectra, with those of amorphous CoZrTa material. We also investigated the permeability spectra of patterned CoFeHfO films with different thicknesses and observed their magnetic domain structures by Kerr imaging microscopy. The granular CoFeHfO material has a better high-frequency response than the amorphous CoZrTa at thicknesses beyond ∼0.5 μm, if the ratio of the real/imaginary parts of the permeability is the principal figure of merit, and is an excellent candidate for high-frequency applications such as integrated magnetic inductors. © 2007 American Institute of Physics.

Original language	English
Article number	123912
Number of pages	4
Journal	Journal of Applied Physics
Volume	101
Issue number	12
DOIs	https://doi.org/10.1063/1.2749419
Publication status	Published - 15 Jun 2007
Externally published	Yes

Bibliographical note

This work was supported in part by Intel Corporation and the National Science Foundation. The authors thank Dr. Robert J. Wilson for helpful discussions.

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10.1063/1.2749419

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@article{c109c297f3fb43e0943836c71634b480,

title = "High-frequency responses of granular CoFeHfO and amorphous CoZrTa magnetic materials",

abstract = "High-resistivity soft magnetic materials are receiving much attention as they have relatively low core loss at high frequencies. We developed magnetically soft granular CoFeHfO material by pulsed-dc reactive magnetron sputtering and compared its electrical and magnetic properties, especially permeability spectra, with those of amorphous CoZrTa material. We also investigated the permeability spectra of patterned CoFeHfO films with different thicknesses and observed their magnetic domain structures by Kerr imaging microscopy. The granular CoFeHfO material has a better high-frequency response than the amorphous CoZrTa at thicknesses beyond ∼0.5 μm, if the ratio of the real/imaginary parts of the permeability is the principal figure of merit, and is an excellent candidate for high-frequency applications such as integrated magnetic inductors. {\textcopyright} 2007 American Institute of Physics.",

author = "Liangliang LI and LEE, {Dok Won} and Ming MAO and Thomas SCHNEIDER and Randhir BUBBER and Kyu-Pyung HWANG and Yongki MIN and WANG, {Shan X.}",

note = "This work was supported in part by Intel Corporation and the National Science Foundation. The authors thank Dr. Robert J. Wilson for helpful discussions.",

year = "2007",

month = jun,

day = "15",

doi = "10.1063/1.2749419",

language = "English",

volume = "101",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - High-frequency responses of granular CoFeHfO and amorphous CoZrTa magnetic materials

AU - LI, Liangliang

AU - LEE, Dok Won

AU - MAO, Ming

AU - SCHNEIDER, Thomas

AU - BUBBER, Randhir

AU - HWANG, Kyu-Pyung

AU - MIN, Yongki

AU - WANG, Shan X.

N1 - This work was supported in part by Intel Corporation and the National Science Foundation. The authors thank Dr. Robert J. Wilson for helpful discussions.

PY - 2007/6/15

Y1 - 2007/6/15

N2 - High-resistivity soft magnetic materials are receiving much attention as they have relatively low core loss at high frequencies. We developed magnetically soft granular CoFeHfO material by pulsed-dc reactive magnetron sputtering and compared its electrical and magnetic properties, especially permeability spectra, with those of amorphous CoZrTa material. We also investigated the permeability spectra of patterned CoFeHfO films with different thicknesses and observed their magnetic domain structures by Kerr imaging microscopy. The granular CoFeHfO material has a better high-frequency response than the amorphous CoZrTa at thicknesses beyond ∼0.5 μm, if the ratio of the real/imaginary parts of the permeability is the principal figure of merit, and is an excellent candidate for high-frequency applications such as integrated magnetic inductors. © 2007 American Institute of Physics.

AB - High-resistivity soft magnetic materials are receiving much attention as they have relatively low core loss at high frequencies. We developed magnetically soft granular CoFeHfO material by pulsed-dc reactive magnetron sputtering and compared its electrical and magnetic properties, especially permeability spectra, with those of amorphous CoZrTa material. We also investigated the permeability spectra of patterned CoFeHfO films with different thicknesses and observed their magnetic domain structures by Kerr imaging microscopy. The granular CoFeHfO material has a better high-frequency response than the amorphous CoZrTa at thicknesses beyond ∼0.5 μm, if the ratio of the real/imaginary parts of the permeability is the principal figure of merit, and is an excellent candidate for high-frequency applications such as integrated magnetic inductors. © 2007 American Institute of Physics.

UR - http://www.scopus.com/inward/record.url?scp=34547278901&partnerID=8YFLogxK

U2 - 10.1063/1.2749419

DO - 10.1063/1.2749419

M3 - Journal Article (refereed)

AN - SCOPUS:34547278901

SN - 0021-8979

VL - 101

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 12

M1 - 123912

ER -

High-frequency responses of granular CoFeHfO and amorphous CoZrTa magnetic materials

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