| Original language | English |
|---|---|
| Patent number | US6,268,270 |
| Publication status | Published - 31 Jul 2001 |
| Externally published | Yes |
Lot-to-lot rapid thermal processing (RTP) preheat optimization (Granted)
S. Joe QIN (Inventor), Glen W. SCHEID (Inventor), Terrence J. RILEY (Inventor), Qingsu WANG (Inventor), Michael MILLER (Inventor)
Research output: Patents, Agreements, Assignments › Patents (non-LU) › peer-review