Mechanical properties of porous and fully dense low-κ dielectric thin films measured by means of nanoindentation and the plane-strain bulge test technique

  • Y. XIANG
  • , X. CHEN
  • , T.Y. TSUI
  • , J.-I. JANG
  • , J.J. VLASSAK*
    • *Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review

45 Citations (Scopus)

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