Mechanical properties of porous and fully dense low-κ dielectric thin films measured by means of nanoindentation and the plane-strain bulge test technique
- Y. XIANG
- , X. CHEN
- , T.Y. TSUI
- , J.-I. JANG
- , J.J. VLASSAK*
*Corresponding author for this work
Research output: Journal Publications › Journal Article (refereed) › peer-review
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