Abstract
A systematical microscopic analysis on structure, morphology, and growth of CoSn3 intermetallic compound (IMC) that formed at the interface between Sn-Pb alloy and Co-P films was carried out using scanning electron microscopy with back-scattered electron imaging and high-resolution transmission electron microscopy with energy dispersive spectrometry. CoSn3 IMC with two kinds of morphology was found out after Sn-Pb alloy reacted with Co-P films with different microstructures. One kind of CoSn3 with stacking fault was distributed densely on nanocrystalline and amorphous Co-P films, and the other kind of CoSn3 without stacking fault existed sparsely on the Co-P film with nanocrystalline/amorphous mixed structure. The stacking fault was caused by the fast growth of CoSn3 for the cases of Co-7 at.% P and Co-23 at.% P. Co-12 at.% P film with a nanocrystalline/amorphous mixed microstructure had the best diffusion-barrier property among Co-P films with different compositions, because the diffusion of Sn into Co-P was the least. Our study shed light on diffusion-barrier performance of Co-based metallization.
Original language | English |
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Pages (from-to) | 2403-2411 |
Number of pages | 9 |
Journal | Microelectronics Reliability |
Volume | 55 |
Issue number | 11 |
Early online date | 29 Jun 2015 |
DOIs | |
Publication status | Published - Nov 2015 |
Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2015 Elsevier Ltd. All rights reserved.
Funding
This work was supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant no. 2011ZX02601), National High Technology Research and Development Program of China (Grant no. 2012AA051104), Tsinghua University Initiative Scientific Research Program (Grant no. 20111080957), and the Scientific Research Foundation for Returned Overseas Chinese Scholars, State Education Ministry.
Keywords
- Diffusion
- Interfaces
- Intermetallics
- Planar faults
- TEM