Abstract
A systematical microscopic analysis on structure, morphology, and growth of CoSn3 intermetallic compound (IMC) that formed at the interface between Sn-Pb alloy and Co-P films was carried out using scanning electron microscopy with back-scattered electron imaging and high-resolution transmission electron microscopy with energy dispersive spectrometry. CoSn3 IMC with two kinds of morphology was found out after Sn-Pb alloy reacted with Co-P films with different microstructures. One kind of CoSn3 with stacking fault was distributed densely on nanocrystalline and amorphous Co-P films, and the other kind of CoSn3 without stacking fault existed sparsely on the Co-P film with nanocrystalline/amorphous mixed structure. The stacking fault was caused by the fast growth of CoSn3 for the cases of Co-7 at.% P and Co-23 at.% P. Co-12 at.% P film with a nanocrystalline/amorphous mixed microstructure had the best diffusion-barrier property among Co-P films with different compositions, because the diffusion of Sn into Co-P was the least. Our study shed light on diffusion-barrier performance of Co-based metallization.
Original language | English |
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Pages (from-to) | 2403-2411 |
Number of pages | 9 |
Journal | Microelectronics Reliability |
Volume | 55 |
Issue number | 11 |
Early online date | 29 Jun 2015 |
DOIs | |
Publication status | Published - Nov 2015 |
Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2015 Elsevier Ltd. All rights reserved.
Keywords
- Diffusion
- Interfaces
- Intermetallics
- Planar faults
- TEM