Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment
- H. Bola GEORGE
- , Yuye TANG
- , Xi CHEN
- , Jiali LI
- , John W. HUTCHINSON
- , Jene A. GOLOVCHENKO
- , Michael J. AZIZ
Research output: Journal Publications › Journal Article (refereed) › peer-review
19
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(Scopus)