Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering

Liangliang LI; Shan X. WANG; Kyu-Pyung HWANG; Yongki MIN; Ming MAO; Thomas SCHNEIDER; Randhir BUBBER

doi:10.1063/1.2158973

Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering

Liangliang LI^*, Shan X. WANG, Kyu-Pyung HWANG, Yongki MIN, Ming MAO, Thomas SCHNEIDER, Randhir BUBBER

^*Corresponding author for this work

Research output: Journal Publications › Journal Article (refereed) › peer-review

7 Citations (Scopus)

Abstract

Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated the substrate dependence of its soft magnetic property. Atomic force microscopy and grazing incidence x-ray-scattering-diffraction spectra show that a rough substrate surface degrades the magnetic property of CoFeHfO thin films with almost the same crystal microstructure. With surface planarization by chemical-mechanical polishing, soft magnetic material CoFeHfO can be realized on the package substrate. This material is promising for future applications in package. © 2006 American Institute of Physics.

Original language	English
Article number	08M301
Journal	Journal of Applied Physics
Volume	99
Issue number	8
DOIs	https://doi.org/10.1063/1.2158973
Publication status	Published - 15 Apr 2006
Externally published	Yes

Bibliographical note

We thank Dr. Arturas Vailionis for his great technical assistance with GIXS measurement at SSRL and Dok Won Lee for useful discussion. The work at Stanford University is supported in part by Intel Corp. and National Science Foundation.

Access to Document

10.1063/1.2158973

Cite this

@article{d4a4db34054148228ce4a6014aa6020b,

title = "Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering",

abstract = "Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated the substrate dependence of its soft magnetic property. Atomic force microscopy and grazing incidence x-ray-scattering-diffraction spectra show that a rough substrate surface degrades the magnetic property of CoFeHfO thin films with almost the same crystal microstructure. With surface planarization by chemical-mechanical polishing, soft magnetic material CoFeHfO can be realized on the package substrate. This material is promising for future applications in package. {\textcopyright} 2006 American Institute of Physics.",

author = "Liangliang LI and WANG, {Shan X.} and Kyu-Pyung HWANG and Yongki MIN and Ming MAO and Thomas SCHNEIDER and Randhir BUBBER",

note = "We thank Dr. Arturas Vailionis for his great technical assistance with GIXS measurement at SSRL and Dok Won Lee for useful discussion. The work at Stanford University is supported in part by Intel Corp. and National Science Foundation.",

year = "2006",

month = apr,

day = "15",

doi = "10.1063/1.2158973",

language = "English",

volume = "99",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering

AU - LI, Liangliang

AU - WANG, Shan X.

AU - HWANG, Kyu-Pyung

AU - MIN, Yongki

AU - MAO, Ming

AU - SCHNEIDER, Thomas

AU - BUBBER, Randhir

N1 - We thank Dr. Arturas Vailionis for his great technical assistance with GIXS measurement at SSRL and Dok Won Lee for useful discussion. The work at Stanford University is supported in part by Intel Corp. and National Science Foundation.

PY - 2006/4/15

Y1 - 2006/4/15

N2 - Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated the substrate dependence of its soft magnetic property. Atomic force microscopy and grazing incidence x-ray-scattering-diffraction spectra show that a rough substrate surface degrades the magnetic property of CoFeHfO thin films with almost the same crystal microstructure. With surface planarization by chemical-mechanical polishing, soft magnetic material CoFeHfO can be realized on the package substrate. This material is promising for future applications in package. © 2006 American Institute of Physics.

AB - Integration of magnetic passive components into package has been attracting more interests recently, but efficient package-compatible magnetic materials are needed. We have developed a package-compatible granular material, CoFeHfO, on a printed circuit board by reactive sputtering and investigated the substrate dependence of its soft magnetic property. Atomic force microscopy and grazing incidence x-ray-scattering-diffraction spectra show that a rough substrate surface degrades the magnetic property of CoFeHfO thin films with almost the same crystal microstructure. With surface planarization by chemical-mechanical polishing, soft magnetic material CoFeHfO can be realized on the package substrate. This material is promising for future applications in package. © 2006 American Institute of Physics.

UR - http://www.scopus.com/inward/record.url?scp=33646797102&partnerID=8YFLogxK

U2 - 10.1063/1.2158973

DO - 10.1063/1.2158973

M3 - Journal Article (refereed)

AN - SCOPUS:33646797102

SN - 0021-8979

VL - 99

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 8

M1 - 08M301

ER -

Package compatibility and substrate dependence of granular soft magnetic material CoFeHfO developed by reactive sputtering

Abstract

Bibliographical note

Access to Document

Other files and links

Fingerprint

Cite this