Recursive Least Squares Estimation and Its Application to Shallow Trench Isolation

Engineering

• Recursive 40%
• Least Square 30%
• Models 20%
• Applications 20%
• Moving Average Filter 20%
• Etch Rate 20%
• Shallow Trench Isolation 20%
• Corrector 20%
• Good Result 20%
• Gas Fuel Manufacture 10%
• Measurement 10%
• Instrumentation 10%
• Control Action 10%
• Filters 10%
• Semiconductor Manufacturing 10%
• Flash Memory 10%
• Deviation Process 10%
• Linear Trend 10%
• Integrator 10%
• Mean Square Error 10%
• Least Square Estimate 10%
• Exponential Factor 10%

Computer Science

• Exponentially Weighted Moving Average 100%
• Control 40%
• Simulation Mode 20%
• Application 20%
• Error Variance 10%
• Critical Process 10%
• Linear Process 10%
• Control Action 10%
• Least Squares Methods 10%
• Classes 10%
• Statistics 10%

Physics

• Controllers 70%
• Estimates 30%
• Model 20%
• Utilization 20%
• Alternatives 10%
• Society 10%
• Technology 10%
• Semiconductor 10%
• Metrology 10%
• Instrumentation 10%