Recursive Least Squares Estimation for Run-to-Run Control With Metrology Delay and Its Application to STI Etch Process
- Jin WANG*
- , Q. Peter HE
- , S. Joc QIN
- , Christopher A. BODE
- , Matthew A. PURDY
*Corresponding author for this work
Research output: Journal Publications › Journal Article (refereed) › peer-review
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(Scopus)