Simulation and fabrication of flexible piezoelectric and pyroelectric hybrid sensors

Ying HU, Zhen GUO, Xiaoran HU, Jinglei YANG, Yong XIANG

Research output: Book Chapters | Papers in Conference ProceedingsConference paper (refereed)Researchpeer-review

2 Citations (Scopus)

Abstract

In this paper, a flexible piezoelectric and pyroelectric hybrid sensor based on the piezoelectric effect and pyroelectric effect of polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) film was designed and prepared. The sensor has the characteristics of flexibility, high sensitivity, and self-driving. It has potential applications for electronic skins, medical detectors, robots, and other fields. The piezoelectric effect and pyroelectric effect of the sensor were simulated using the commercial finite element software COMSOL Multiphysics, and the influence of film thickness on the device performance was analyzed, as well as the relationship between the temperature conversion rate and charge response. The simulation results were verified by experiments. Combining the finite element simulation and the experimental data, the structure of the piezoelectric and pyroelectric hybrid sensor is optimized, and the device performance is improved.

Original languageEnglish
Title of host publicationProceedings : 2020 3rd International Conference on Advanced Electronic Materials, Computers and Software Engineering, AEMCSE 2020
PublisherIEEE
Pages712-715
Number of pages4
ISBN (Electronic)9781728181431
DOIs
Publication statusPublished - Apr 2020
Externally publishedYes
Event3rd International Conference on Advanced Electronic Materials, Computers and Software Engineering, AEMCSE 2020 - Shenzhen, China
Duration: 24 Apr 202026 Apr 2020

Conference

Conference3rd International Conference on Advanced Electronic Materials, Computers and Software Engineering, AEMCSE 2020
Country/TerritoryChina
CityShenzhen
Period24/04/2026/04/20

Bibliographical note

Publisher Copyright:
© 2020 IEEE.

Keywords

  • Finite element analysis
  • Flexible sensor
  • Piezoelectric and pyroelectric hybrid sensors
  • Pvdf-trfe sensors

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