TY - GEN
T1 - Stability Analysis of Double Ewma Run-To-Run Control with Metrology Delay
AU - GOOD, Richard
AU - QIN, S. Joe
PY - 2002/5
Y1 - 2002/5
N2 - The double exponentially weighted moving average (d-EWMA) feedback controller is a popular algorithm for controlling semiconductor manufacturing processes which have a deterministic drift. Like all controllers, a poorly tuned d-EWMA controller can result in system instabilities. This paper examines stability bounds for the tuning parameters of both single input-single output (SISO) and multiple input-multiple output (MIMO) d-EWMA controllers when there is plant-model mismatch and delay between product manufacturing and product metrology. In addition, a simulation of chemical mechanical planarization run-to-run (R2R) control is included to illustrate the importance of performing stability analysis in choosing d-EWMA tuning parameters.
AB - The double exponentially weighted moving average (d-EWMA) feedback controller is a popular algorithm for controlling semiconductor manufacturing processes which have a deterministic drift. Like all controllers, a poorly tuned d-EWMA controller can result in system instabilities. This paper examines stability bounds for the tuning parameters of both single input-single output (SISO) and multiple input-multiple output (MIMO) d-EWMA controllers when there is plant-model mismatch and delay between product manufacturing and product metrology. In addition, a simulation of chemical mechanical planarization run-to-run (R2R) control is included to illustrate the importance of performing stability analysis in choosing d-EWMA tuning parameters.
UR - http://www.scopus.com/inward/record.url?scp=0036343702&partnerID=8YFLogxK
U2 - 10.1109/acc.2002.1023956
DO - 10.1109/acc.2002.1023956
M3 - Conference paper (refereed)
SN - 0780372980
T3 - Proceedings of the American Control Conference
SP - 2156
EP - 2161
BT - Proceedings of the 2002 American Control Conference
PB - Institute of Electrical and Electronics Engineers
T2 - 2002 American Control Conference (ACC)
Y2 - 8 May 2002 through 10 May 2002
ER -